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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,
this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
- Sales Rank: #3253735 in Books
- Brand: Brand: CRC Press
- Published on: 2001-06-29
- Original language: English
- Number of items: 1
- Dimensions: 10.00" h x 7.25" w x 1.50" l, 3.73 pounds
- Binding: Hardcover
- 896 pages
- Used Book in Good Condition
Review
…recommended for special libraries and academic libraries serving graduate level programs in these areas.
- E-Streams
…a cornerstone reference source….uniquely ample and thorough.
-Semiconductor International
…a formative instrument. …contains valuable and very new information … an instructive and valuable book.
-IASI Polytechnic Magazine
Most helpful customer reviews
0 of 0 people found the following review helpful.
The best book on semiconductor metrology.
By Leo
This book is the best that you will find on Semiconductor Metrology. Every chapter is written by the leading expert in the field. This is a much better approach than most textbooks, where one individual attempts to write the whole book themselves. It is a must have reference for anyone going to school or working in the semiconductor field. Highly recommend it.
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